While Sandia initially was motivated to investigate emergent microsystem technology to miniaturize existing macroscale
structures, present designs embody innovative approaches that directly exploit the fundamentally different material
properties of a new technology at the micro- and nano-scale. Direct, hands-on experience with the emerging technology
gave Sandia engineers insights that not only guided the evolution of the technology but also enabled them to address new
applications that enlarged the customer base for the new technology. Sandia's early commitment to develop complex
microsystems demonstrated the advantages that early adopters gain by developing an extensive design and process tool
kit and a shared awareness of multiple approaches to achieve the multiple goals.
As with any emergent technology, Sandia's program benefited from interactions with the larger technical community.
However, custom development followed a spiral path of direct trial-and-error experience, analysis, quantification of
materials properties at the micro- and nano-scale, evolution of design tools and process recipes, and an understanding of
reliability factors and failure mechanisms even in extreme environments. The microsystems capability at Sandia relied
on three key elements. The first was people: a mix of mechanical and semiconductor engineers, chemists, physical
scientists, designers, and numerical analysts. The second was a unique facility that enabled the development of custom
technologies without contaminating mainline product deliveries. The third was the arrival of specialized equipment as
part of a Cooperative Research And Development Agreement (CRADA) enabled by the National Competitiveness
Technology Transfer Act of 1989. Underpinning all these, the program was guided and sustained through the research
and development phases by accomplishing intermediate milestones addressing direct mission needs.
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