Piezoelectric AlN-actuated micro-tuning forks for sensing applications

M. Gil; T. Manzaneque; J. Hernando-García; A. Ababneh; H. Seidel; J. L. Sánchez-Rojas

doi:10.1117/12.886997

5 May 2011 Piezoelectric AlN-actuated micro-tuning forks for sensing applications

M. Gil, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, J. L. Sánchez-Rojas

Proceedings Volume 8066, Smart Sensors, Actuators, and MEMS V; 80661I (2011) https://doi.org/10.1117/12.886997
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

In this work, we present a detailed study of the first vibration modes of a micro-tuning fork electrically actuated by means of a differential electrode lying on a piezoelectric AlN layer. The actuation through a differential electrode allows the optimal excitation of the modes of interest, including in-plane modes. Lateral and perpendicular displacements have been measured for a complete characterization of the resonator. Promising results have been obtained, including high values of the quality factor, which reach values above 4300 in air for the anti-phase in-plane modes.

Citation Download Citation

M. Gil, T. Manzaneque, J. Hernando-García, A. Ababneh, H. Seidel, and J. L. Sánchez-Rojas "Piezoelectric AlN-actuated micro-tuning forks for sensing applications", Proc. SPIE 8066, Smart Sensors, Actuators, and MEMS V, 80661I (5 May 2011); https://doi.org/10.1117/12.886997

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