Thickness control of a thin film after drying through thermal and evaporative management in drying process of a polymer solution coated on a flat substrate: application of the dynamical model of the drying process

Hiroyuki Kagami; Hiroshi Kubota

doi:10.1117/12.886827

3 May 2011 Thickness control of a thin film after drying through thermal and evaporative management in drying process of a polymer solution coated on a flat substrate: application of the dynamical model of the drying process

Hiroyuki Kagami, Hiroshi Kubota

Author Affiliations +

Proceedings Volume 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V; 806813 (2011) https://doi.org/10.1117/12.886827
Event: SPIE Microtechnologies, 2011, Prague, Czech Republic

Abstract

We have proposed and modified a model of drying process of polymer solution coated on a flat substrate for flat polymer film fabrication supposing resist coating process in semiconductor engineering process and so on. And we have clarified dependence of distribution of polymer molecules on a flat substrate on a various parameters based on analysis of many numerical simulations of the model. Then we applied the model to thickness control of a thin film after drying through thermal management. But minute thickness control of a thin film after drying was not enough and more minute thickness control of it was desired. Therefore, in this study, we add evaporative management for more minute thickness control of a thin film after drying. As a result, thickness control of a thin film after drying in drying process of a polymer solution coated on a flat substrate can be improved further through adding evaporative operations to thermal operations artificially and instantaneously depending on solute's distribution during drying.

Citation Download Citation

Hiroyuki Kagami and Hiroshi Kubota "Thickness control of a thin film after drying through thermal and evaporative management in drying process of a polymer solution coated on a flat substrate: application of the dynamical model of the drying process", Proc. SPIE 8068, Bioelectronics, Biomedical, and Bioinspired Systems V; and Nanotechnology V, 806813 (3 May 2011); https://doi.org/10.1117/12.886827

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