Axicon metrology using high line density computer-generated holograms

Jun Ma; Christof Pruss; Matthias Häfner; Rihong Zhu; Zhishan Gao; Caojin Yuan; Wolfgang Osten

doi:10.1117/12.889572

26 May 2011 Axicon metrology using high line density computer-generated holograms

Jun Ma, Christof Pruss, Matthias Häfner, Rihong Zhu, Zhishan Gao, Caojin Yuan, Wolfgang Osten

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80821I (2011) https://doi.org/10.1117/12.889572
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

Axicon surfaces are widely used in nowadays optical engineering, requiring accurate metrology for these highly aspheric surfaces. In this contribution, we present a complete approach to determine the shape deviation of axicons in an absolute manner. The setup is an interferometric null configuration using a computer generated hologram (CGH) as null optics. We demonstrate an absolute shifting method and the calibration issues connected with measuring the absolute cone angle. Experimental results are shown for the metrology of a 90° cone angle sample.

Citation Download Citation

Jun Ma, Christof Pruss, Matthias Häfner, Rihong Zhu, Zhishan Gao, Caojin Yuan, and Wolfgang Osten "Axicon metrology using high line density computer-generated holograms", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80821I (26 May 2011); https://doi.org/10.1117/12.889572

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