Development of traceability methodology for optical coherence tomography (OCT) using step height standard as calibration reference

Iakyra B. Couceiro; Thiago Ferreira da Silva; Luiz V. G. Tarelho; Carlos L. S. Azeredo; Igor Malinovski; Hans P. H. Grieneisein; Wellington S. Barros; Giancarlo V. Faria; Jean P. von der Weid; Marcello M. Amaral; Marcus P. Raele; Anderson Z. de Freitas

doi:10.1117/12.889404

27 May 2011 Development of traceability methodology for optical coherence tomography (OCT) using step height standard as calibration reference

Iakyra B. Couceiro, Thiago Ferreira da Silva, Luiz V. G. Tarelho, Carlos L. S. Azeredo, Igor Malinovski, Hans P. H. Grieneisein, Wellington S. Barros, Giancarlo V. Faria, Jean P. von der Weid, Marcello M. Amaral, Marcus P. Raele, Anderson Z. de Freitas

Author Affiliations +

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80822P (2011) https://doi.org/10.1117/12.889404
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

This paper presents a methodology for providing traceability to OCT measurements linked to Length SI unit. The link to primary length standard is provided by an interference microscope (IM). The chosen transfer standard was a step height gauge block. The results for IM and OCT showed good agreement for step height standards, such that the OCT will be able to perform reliable measurements of complex surface topographies and to ensure traceability to the length scale. The main uncertainty components were evaluated for the OCT system. In addition, OCT also was used for measuring a surface roughness standard -a depth standard - in order to test this methodology for round groove profiles. Results were found to be in good agreement with the calibration certificate.

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Iakyra B. Couceiro, Thiago Ferreira da Silva, Luiz V. G. Tarelho, Carlos L. S. Azeredo, Igor Malinovski, Hans P. H. Grieneisein, Wellington S. Barros, Giancarlo V. Faria, Jean P. von der Weid, Marcello M. Amaral, Marcus P. Raele, and Anderson Z. de Freitas "Development of traceability methodology for optical coherence tomography (OCT) using step height standard as calibration reference", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80822P (27 May 2011); https://doi.org/10.1117/12.889404

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