Full-scale simulation of angle-resolved focused-beam scatterometry applied to aperiodic isolated features: model validity analysis and numerical results

S. E. Kozik; A. G. Smirnov

doi:10.1117/12.889496

23 May 2011 Full-scale simulation of angle-resolved focused-beam scatterometry applied to aperiodic isolated features: model validity analysis and numerical results

S. E. Kozik, A. G. Smirnov

Author Affiliations +

Proceedings Volume 8083, Modeling Aspects in Optical Metrology III; 80830A (2011) https://doi.org/10.1117/12.889496
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

We pursue the objective of developing a scatterometer based on focused-beam illumination and back-focal plane imaging which is suitable for characterization of truly three-dimensional objects and provides locally-resolved measurements unlike most of the state-of-the-art scatterometry tools. In this paper a full-scale simulation model for the scatterometry is proposed, comprising vector description for the illumination and imaging in terms of physical optics, and rigorous calculation of light-object interaction in the near field by a finite-difference-in-time-domain solver. Using the model we optimize the scatterometry technique to get higher sensitivity to nano-scale dimensional variations of the profile of test patterns. It has been demonstrated that asymmetry of the scattered field distribution allows one to determine separately different parameters of test structures, including refractive index, height, width, side wall, and orientation. Finally, we present a comparison of our approach with the through-focus scanning optical microscopy method.

Citation Download Citation

S. E. Kozik and A. G. Smirnov "Full-scale simulation of angle-resolved focused-beam scatterometry applied to aperiodic isolated features: model validity analysis and numerical results", Proc. SPIE 8083, Modeling Aspects in Optical Metrology III, 80830A (23 May 2011); https://doi.org/10.1117/12.889496

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