Industrial Applications Of Confocal Scanning Optical Microscopy

Andrew J. Dixon; Nick Doe; Tia-Min Pang

doi:10.1117/12.941493

3 August 1987 Industrial Applications Of Confocal Scanning Optical Microscopy

Andrew J. Dixon, Nick Doe, Tia-Min Pang

Proceedings Volume 0809, Scanning Imaging Technology; (1987) https://doi.org/10.1117/12.941493
Event: Fourth International Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, The Hague, Netherlands

Abstract

The confocal scanning optical microscope exploits three unique capabilities of a point probing light scanning system: differential phase contrast, confocal sectioning and optical beam induced current (OBIC) imaging. Applications of these capabilities in materials microscopy, semiconductor failure analysis and biological microscopy are described. The design considerations of the Lasersharp scanning confocal microscope are outlined.

Citation Download Citation

Andrew J. Dixon, Nick Doe, and Tia-Min Pang "Industrial Applications Of Confocal Scanning Optical Microscopy", Proc. SPIE 0809, Scanning Imaging Technology, (3 August 1987); https://doi.org/10.1117/12.941493

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