Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution

Vassilis Papadakis; Michael A. Everest; Katerina Stamataki; Stelios Tzortzakis; Benoit Loppinet; T. Peter Rakitzis

doi:10.1117/12.903053

20 September 2011 Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution

Vassilis Papadakis, Michael A. Everest, Katerina Stamataki, Stelios Tzortzakis, Benoit Loppinet, T. Peter Rakitzis

Proceedings Volume 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V; 81050L (2011) https://doi.org/10.1117/12.903053
Event: SPIE NanoScience + Engineering, 2011, San Diego, California, United States

Abstract

Cavity-enhanced ellipsometry, using nanosecond pulsed lasers and without moving parts, is demonstrated to have submicrosecond time resolution. The ellipsometric phase angles are measured from the Fourier transform of the cavity ring-down experimental signals, with a sensitivity 0.01 degrees. The technique is applied to highly reflective surfaces, including total internal reflection, where the samples are placed within the evanescent wave. The technique can be generalized to broadband sources, such as from supercontinuum generation, allowing spectral resolution of thin films and monolayer samples.

Citation Download Citation

Vassilis Papadakis, Michael A. Everest, Katerina Stamataki, Stelios Tzortzakis, Benoit Loppinet, and T. Peter Rakitzis "Development of cavity ring-down ellipsometry with spectral and submicrosecond time resolution", Proc. SPIE 8105, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V, 81050L (20 September 2011); https://doi.org/10.1117/12.903053

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