Metrological Grating Technology Developments

Huang Shang-lian

doi:10.1117/12.941751

9 February 1987 Metrological Grating Technology Developments

Huang Shang-lian

Proceedings Volume 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III; (1987) https://doi.org/10.1117/12.941751
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

This paper concerns the work of the Opto-Electronic Precision Machinery Laboratory on the moire principle, manufacture, calibration, and application of radial and linear metrological gratings.

Citation Download Citation

Huang Shang-lian "Metrological Grating Technology Developments", Proc. SPIE 0815, Application and Theory of Periodic Structures, Diffraction Gratings, and Moire Phenomena III, (9 February 1987); https://doi.org/10.1117/12.941751

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