A novel MEMS field emission accelerometer based on silicon nanotips array

Li Chen; Zhi-yu Wen; Zhong-quan Wen; Hai-tao Liu

doi:10.1117/12.901052

8 September 2011 A novel MEMS field emission accelerometer based on silicon nanotips array

Li Chen, Zhi-yu Wen, Zhong-quan Wen, Hai-tao Liu

Proceedings Volume 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies; 819127 (2011) https://doi.org/10.1117/12.901052
Event: International Symposium on Photoelectronic Detection and Imaging 2011, 2011, Beijing, China

Abstract

A novel MEMS field emission accelerometer based on silicon nanotips array with about 10000 silicon tips in total is proposed. It consists of a proof mass, four L-shaped springs, silicon nanotips array, anode and feedback electrodes. The sensor is fabricated on one N-type (1 0 0) single crystal silicon wafer and one #7740 glass wafer using bulk silicon micromachining technology. The silicon tip arrays are form by wet etching with HNA (HNO₃, HF and CH₃COOH) with I₂ as additive. After oxidation sharpening, the curvature radius of the tips is smaller than 50nm, and the tip arrays are metalized by sputtering TiW/Au film. ICP process is utilized to release the sensor chip. In order to improve the linearity of the sensor, a feedback control circuit is used to rebalance the proof mass. The accelerometer is tested on a dividing head and test results show that the sensitivity is about 420mV/g and nonlinearity is about 0.7% over a range of -1g~1g.

Citation Download Citation

Li Chen, Zhi-yu Wen, Zhong-quan Wen, and Hai-tao Liu "A novel MEMS field emission accelerometer based on silicon nanotips array", Proc. SPIE 8191, International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies, 819127 (8 September 2011); https://doi.org/10.1117/12.901052

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