A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching

Yixian Ge; Junping Zhou; Tingting Wang

doi:10.1117/12.910383

22 November 2011 A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching

Yixian Ge, Junping Zhou, Tingting Wang

Proceedings Volume 8199, 2011 International Conference on Optical Instruments and Technology: Optical Sensors and Applications; 81991L (2011) https://doi.org/10.1117/12.910383
Event: International Conference on Optical Instruments and Technology (OIT2011), 2011, Beijing, Beijing, China

Abstract

A miniature fiber optic pressure sensor based on Fabry-Perot interference fabricated on the tip of a single mode (SM) fiber is presented. The sensor measures only 125μm in diameter. A Fabry-Perot cavity and a thin silica diaphragm are fabricated by simple techniques involving only cleaving, wet chemical etching and fusion splicing. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The overall chemical reaction of the fiber wet etching is specifically represented. Pressure testing system is carried out. By tracing a peak point in the interference spectrum, the gap length of the sensor can be demodulated. Experimental results show the sensor has a good linearity. The sensor is made entirely of fused silica, whose structure has good stability, cabinet, simple for fabrication and low cost.

Citation Download Citation

Yixian Ge, Junping Zhou, and Tingting Wang "A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching", Proc. SPIE 8199, 2011 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 81991L (22 November 2011); https://doi.org/10.1117/12.910383

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available