Directed self-assembly defectivity assessment. Part II

Chris Bencher; He Yi; Jessica Zhou; Manping Cai; Jeffrey Smith; Liyan Miao; Ofir Montal; Shiran Blitshtein; Alon Lavi; Kfir Dotan; Huixiong Dai; Joy Y. Cheng; Daniel P. Sanders; Melia Tjio; Steven Holmes

doi:10.1117/12.917993

16 April 2012 Directed self-assembly defectivity assessment. Part II

Chris Bencher, He Yi, Jessica Zhou, Manping Cai, Jeffrey Smith, Liyan Miao, Ofir Montal, Shiran Blitshtein, Alon Lavi, Kfir Dotan, Huixiong Dai, Joy Y. Cheng, Daniel P. Sanders, Melia Tjio, Steven Holmes

Author Affiliations +

Proceedings Volume 8323, Alternative Lithographic Technologies IV; 83230N (2012) https://doi.org/10.1117/12.917993
Event: SPIE Advanced Lithography, 2012, San Jose, California, United States

Abstract

The main concern for the commercialization of directed self-assembly (DSA) for semiconductor manufacturing continues to be the uncertainty in capability and control of defect density. Our research investigates the defect densities of various DSA process applications in the context of a 300mm wafer fab cleanroom environment; this paper expands substantially on the previously published DSA defectivity study by reporting a defect density process window relative to chemical epitaxial pre-pattern registration lines; as well as investigated DSA based contact hole shrinking and report critical dimension statistics for the phase separated polymers before and after etch, along with positional accuracy measurements and missing via defect density.

Citation Download Citation

Chris Bencher, He Yi, Jessica Zhou, Manping Cai, Jeffrey Smith, Liyan Miao, Ofir Montal, Shiran Blitshtein, Alon Lavi, Kfir Dotan, Huixiong Dai, Joy Y. Cheng, Daniel P. Sanders, Melia Tjio, and Steven Holmes "Directed self-assembly defectivity assessment. Part II", Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83230N (16 April 2012); https://doi.org/10.1117/12.917993

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available