Optimization of the edge extension in dwell time algorithm for ion beam figuring

Liangxuan Shu; Fan Wu; Chunyan Shi

doi:10.1117/12.974277

16 October 2012 Optimization of the edge extension in dwell time algorithm for ion beam figuring

Liangxuan Shu, Fan Wu, Chunyan Shi

Proceedings Volume 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 84162M (2012) https://doi.org/10.1117/12.974277
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Ion beam figuring is capacity of removing materials at atoms, and the optical quality after polishing depends on not only the accuracy of processing but also the accuracy of dwell time algorithm. Deconvolution is a common method of determining the dwell time and it is generally carried out by matrix operations in the computer, so the surface figure of the optical component needs to be extended to cover throughout the matrix. First, this paper analyses the disadvantages of the extension by zero setting and Gaussian extension. And then based on the principle of matrix convolution an optimization method for the edge extension is proposed, which predicts the desired surface figure by the convolution of points in the workpiece. Finally, the simulations for ion beam figuring with Gauss extension and the optimization method proposed are made, and the results show that the optimization method taken into account the action of inner points has the better effect: the edge effect is suppressed more effectively and the algorithm achieves higher accuracy.

Citation Download Citation

Liangxuan Shu, Fan Wu, and Chunyan Shi "Optimization of the edge extension in dwell time algorithm for ion beam figuring", Proc. SPIE 8416, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 84162M (16 October 2012); https://doi.org/10.1117/12.974277

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