Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned generation

Y.-C. Li; L.-C. Cheng; C.-H. Lien; C.-Y. Chang; W.-C. Yen; S.-J. Chen

doi:10.1117/12.930307

19 October 2012 Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned generation

Y.-C. Li, L.-C. Cheng, C.-H. Lien, C.-Y. Chang, W.-C. Yen, S.-J. Chen

Author Affiliations +

Proceedings Volume 8489, Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II; 848905 (2012) https://doi.org/10.1117/12.930307
Event: SPIE Optical Engineering + Applications, 2012, San Diego, California, United States

Abstract

One of the limits of a conventional multiphoton microfabrication is its low throughput due to the sequential nature of scanning process. In this study, a multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to provide freeform polymer microstructures fast. The system integrates a 10 kHz repetition rate ultrafast amplifier featuring strong instantanrror device generating designed patterns at the focal plane. As the result, three-dimensional freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking up two-dimensional (2D) structures layer-by-layer. The size of each 2D fabrication area can be larger than 100 × 100 μm². Compared with scanning process or fixed mask pattern generation, this approach provides two- or three-fold fabrication speed and freeform microstructures. Furthermore, the system is capable of optical sectioning the fabricated microstructures for providing 3D inspection.

Citation Download Citation

Y.-C. Li, L.-C. Cheng, C.-H. Lien, C.-Y. Chang, W.-C. Yen, and S.-J. Chen "Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned generation", Proc. SPIE 8489, Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II, 848905 (19 October 2012); https://doi.org/10.1117/12.930307

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