Design and theoretical investigation of nanograting for XUV outcoupler

Ying-Ying Yang; Wei Sun; Ling Zhang; Huai-Juan Yu; Xue-Chun Lin

doi:10.1117/12.2001123

26 November 2012 Design and theoretical investigation of nanograting for XUV outcoupler

Ying-Ying Yang, Wei Sun, Ling Zhang, Huai-Juan Yu, Xue-Chun Lin

Proceedings Volume 8557, Optical Design and Testing V; 855727 (2012) https://doi.org/10.1117/12.2001123
Event: Photonics Asia, 2012, Beijing, China

Abstract

We have theoretically investigated and optimized a nano-periodical highly-efficient blazed grating, which is used as an outcoupler for extreme-ultraviolet (XUV) radiation. The rigorous coupled-wave analysis (RCWA) with S matrix method is employed to optimize the parameters of the grating. The grating is designed to be etched on top layers of IR reflector, performs as a highly-reflective mirror for IR light and highly-efficient outcoulper for XUV. The diffraction efficiency of -1 order of this XUV outcoupler is greater than 20% in the range near 60 nm, which allows high resolution spectroscopy of the 1s-2s transition in He⁺ at around 60 nm with extreme precision. The theoretical calculations are verified by the experimental results.

Citation Download Citation

Ying-Ying Yang, Wei Sun, Ling Zhang, Huai-Juan Yu, and Xue-Chun Lin "Design and theoretical investigation of nanograting for XUV outcoupler", Proc. SPIE 8557, Optical Design and Testing V, 855727 (26 November 2012); https://doi.org/10.1117/12.2001123

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