Hologram design for holographic laser machining inside transparent materials

Masaaki Sakakura; Naoaki Fukua; Yasuhiko Shimotsuma; Kazuyuki Hirao; Kiyotaka Miura

doi:10.1117/12.2003829

13 March 2013 Hologram design for holographic laser machining inside transparent materials

Masaaki Sakakura, Naoaki Fukua, Yasuhiko Shimotsuma, Kazuyuki Hirao, Kiyotaka Miura

Proceedings Volume 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII; 86070V (2013) https://doi.org/10.1117/12.2003829
Event: SPIE LASE, 2013, San Francisco, California, United States

Abstract

A holographic laser machining can improve the processing efficiency. In the method, multiple light spots are generated at the processing positions by focusing a spatially phase modulated laser beam with a spatial light modulator. When this method is applied to bulk-laser machining, the accuracy of focusing positions is sometimes reduced because of the distortion of light focusing. In this paper, we present two calculation method of a phase hologram for reducing the distortion of light focusing. One method is based on the iterative Fourier transform method. In this method, the distortion of light focusing was reduced by fixing phase in light spots in the iterative process. The other is based on the optimal rotation angle method. In this method, the evaluation function was modified to make the light intensity at the positions of phase jump zero. In both two methods, we succeed to improve the quality of light spots. In addition, we show the application of these methods to writing of optical waveguides inside glasses.

Citation Download Citation

Masaaki Sakakura, Naoaki Fukua, Yasuhiko Shimotsuma, Kazuyuki Hirao, and Kiyotaka Miura "Hologram design for holographic laser machining inside transparent materials", Proc. SPIE 8607, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, 86070V (13 March 2013); https://doi.org/10.1117/12.2003829

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