Optimal configuration for the dual rotating-compensator Mueller matrix ellipsometer

Weichao Du; Shiyuan Liu; Chuanwei Zhang; Xiuguo Chen

doi:10.1117/12.2014578

31 January 2013 Optimal configuration for the dual rotating-compensator Mueller matrix ellipsometer

Weichao Du, Shiyuan Liu, Chuanwei Zhang, Xiuguo Chen

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 875925 (2013) https://doi.org/10.1117/12.2014578
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

The dual rotating-compensator Mueller matrix ellipsometer based on the optical configuration PC1r(ω1)SC2r(ω2)A has been developed recently with many applications such as characterization of thin film growth and surface modification. In this paper, the optimal configuration of this ellipsometer is performed by minimizing the condition number of the systematic data reduction matrix. We present the optimal orientation angles of the polarizer (P) and the analyzer (A), as well as the optimal number of sampling points and the optimal retardance of both compensators, and find that these optimal configurations at different frequency ratios of the two compensators (C1r and C2r) yield almost equal performance. Simulations conducted on this ellipsometer with different parameters have demonstrated that the optimal configuration improves the measurement accuracy.

Citation Download Citation

Weichao Du, Shiyuan Liu, Chuanwei Zhang, and Xiuguo Chen "Optimal configuration for the dual rotating-compensator Mueller matrix ellipsometer", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875925 (31 January 2013); https://doi.org/10.1117/12.2014578

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available