Reduction of measurement errors with two-channel configuration in the Mueller matrix ellipsometer

Weiqi Li; Shiyuan Liu; Chuanwei Zhang; Xiuguo Chen

doi:10.1117/12.2014581

31 January 2013 Reduction of measurement errors with two-channel configuration in the Mueller matrix ellipsometer

Weiqi Li, Shiyuan Liu, Chuanwei Zhang, Xiuguo Chen

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 875954 (2013) https://doi.org/10.1117/12.2014581
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

The random noise and the systematic errors caused by azimuthal errors of the optical elements, i.e., the polarizer, the analyzer, or the compensator, would lead to measurement errors in the Mueller matrix ellipsometer (MME). In this paper, we develop the two-channel MME of the optical configuration PC_r1SC_r2Wp by replacing the analyzer with a Wollaston prism. In the two-channel MME, two intensity spectra would be acquired simultaneously due to the separation and orthogonal polarization of two light beams by the Wollaston prism and are combined to deduce the Mueller matrix. Two figures of merit are derived to evaluate the effects of random noise and systematic errors on the Mueller matrix measurement, and numerical simulations demonstrate that the two-channel MME can give access to higher accuracy by reducing measurement errors due to random noise and systematic errors.

Citation Download Citation

Weiqi Li, Shiyuan Liu, Chuanwei Zhang, and Xiuguo Chen "Reduction of measurement errors with two-channel configuration in the Mueller matrix ellipsometer", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875954 (31 January 2013); https://doi.org/10.1117/12.2014581

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KEYWORDS

Error analysis

Prisms

Condition numbers

Polarizers

Birefringence

Optical components

Polarization

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