Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25-80nm wavelength region

Regina Soufli; Mónica Fernández-Perea; Jeff C. Robinson; Sherry L. Baker; Jennifer Alameda; Christopher C. Walton; Luis Rodríguez-De Marcos; Jose A. Méndez; Juan I. Larruquert; Manuela Vidal-Dasilva; Eric M. Gullikson

doi:10.1117/12.2024955

27 September 2013 Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25-80nm wavelength region

Regina Soufli, Mónica Fernández-Perea, Jeff C. Robinson, Sherry L. Baker, Jennifer Alameda, Christopher C. Walton, Luis Rodríguez-De Marcos, Jose A. Méndez, Juan I. Larruquert, Manuela Vidal-Dasilva, Eric M. Gullikson

Author Affiliations +

Proceedings Volume 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X; 88490D (2013) https://doi.org/10.1117/12.2024955
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Mg/SiC multilayer coatings with Al-Mg corrosion barrier layers and with high reflectance in up to three narrow wavelength bands within the 25-80 nm wavelength region have been developed for EUV laser source applications. The physics of the spontaneous intermixing and amorphization of the Al-Mg corrosion barriers for Mg/SiC multilayers are currently being investigated in detail. Initial results from studies of the long-term reflectance properties of corrosionresistant Mg/SiC multlayers are also discussed.

Citation Download Citation

Regina Soufli, Mónica Fernández-Perea, Jeff C. Robinson, Sherry L. Baker, Jennifer Alameda, Christopher C. Walton, Luis Rodríguez-De Marcos, Jose A. Méndez, Juan I. Larruquert, Manuela Vidal-Dasilva, and Eric M. Gullikson "Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25-80nm wavelength region", Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490D (27 September 2013); https://doi.org/10.1117/12.2024955

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available