Model-based polishing of meter size optics

Jan-Claas Kupfer; Marcel Achtsnick; Elisabeth Becker

doi:10.1117/12.2026930

15 October 2013 Model-based polishing of meter size optics

Jan-Claas Kupfer, Marcel Achtsnick, Elisabeth Becker

Proceedings Volume 8884, Optifab 2013; 88841P (2013) https://doi.org/10.1117/12.2026930
Event: SPIE Optifab, 2013, Rochester, New York, United States

Abstract

In display or semiconductor manufacturing it is a constant drive towards the use of scale effects to reduce costs per unit. For equipment suppliers this leads to ever bigger optical components. To answer this need new cost-efficient technologies are required. In the process chain, the polishing step is one of the most important as it defines the optical surface. In this work the polishing step of a planar surface of a cylindrical component is investigated. A simulation for long scanning optics starting from Preston equation has been derived. By separating the optical surface into several zones, velocity variable polishing paths have been computed. Including pressure differences at the edges so called removal maps have been plotted. At the end, it has been verified that the model approach is able to influence polishing results of meter size optics by velocity controlled polishing.

Citation Download Citation

Jan-Claas Kupfer, Marcel Achtsnick, and Elisabeth Becker "Model-based polishing of meter size optics", Proc. SPIE 8884, Optifab 2013, 88841P (15 October 2013); https://doi.org/10.1117/12.2026930

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available