Error analysis and modeling for the time grating length measurement system

Zhonghua Gao; Jiqin Fen; Fangyan Zheng; Ziran Chen; Donglin Peng; Xiaokang Liu

doi:10.1117/12.2035697

10 October 2013 Error analysis and modeling for the time grating length measurement system

Zhonghua Gao, Jiqin Fen, Fangyan Zheng, Ziran Chen, Donglin Peng, Xiaokang Liu

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89163J (2013) https://doi.org/10.1117/12.2035697
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

Through analyzing errors of the length measurement system in which a linear time grating was the principal measuring component, we found that the study on the error law was very important to reduce system errors and optimize the system structure. Mainly error sources in the length measuring system, including the time grating sensor, slide way, and cantilever, were studied; and therefore total errors were obtained. Meanwhile we erected the mathematic model of errors of the length measurement system. Using the error model, we calibrated system errors being in the length measurement system. Also, we developed a set of experimental devices in which a laser interferometer was used to calibrate the length measurement system errors. After error calibrating, the accuracy of the measurement system was improved from original 36um/m to 14um/m. The fact that experiment results are consistent with the simulation results shows that the error mathematic model is suitable for the length measuring system.

Citation Download Citation

Zhonghua Gao, Jiqin Fen, Fangyan Zheng, Ziran Chen, Donglin Peng, and Xiaokang Liu "Error analysis and modeling for the time grating length measurement system", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89163J (10 October 2013); https://doi.org/10.1117/12.2035697

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