Characterization of planar microlenses made of high contrast gratings

Annett B Klemm; Daan Stellinga; Emiliano R. Martins; Liam Lewis; Liam O’Faolain; Thomas F. Krauss

doi:10.1117/12.2045726

19 February 2014 Characterization of planar microlenses made of high contrast gratings

Annett B Klemm, Daan Stellinga, Emiliano R. Martins, Liam Lewis, Liam O’Faolain, Thomas F. Krauss

Proceedings Volume 8995, High Contrast Metastructures III; 89950L (2014) https://doi.org/10.1117/12.2045726
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

We report on the focusing performance of reflective 2D high contrast grating lenses based on silicon. The combination of their subwavelength nature and their high refractive index contrast make it possible to create highly tolerant and planar microlenses. We used a rigorous mathematical code to design the lenses and verified their performance with finite element simulations. We also investigated the effects of grating thickness, angle and wavelength of incidence in these simulations. Experimentally, we show the evolution of the beam profile along the optical axis for a lens with a high (0.37) numerical aperture. We have explored a wide range of numerical apertures (0.1 – 0.93) and focal lengths (5 μm – 140 μm) and show that the lenses behave as expected across the full range. Our analyses demonstrate the large design flexibility with which these lenses can be made along with ease of fabrication and potential for a number of applications in micro-optics.

Citation Download Citation

Annett B Klemm, Daan Stellinga, Emiliano R. Martins, Liam Lewis, Liam O’Faolain, and Thomas F. Krauss "Characterization of planar microlenses made of high contrast gratings", Proc. SPIE 8995, High Contrast Metastructures III, 89950L (19 February 2014); https://doi.org/10.1117/12.2045726

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available