Repetitive operation of counter-facing plasma focus device: toward a practical light source for EUV lithography

Tatsuya Sodekoda; Hajime Kuwabara; Masashi Masuda; Shijia Liu; Kouki Kanou; Kenta Kawaguchi; Kazuhiko Horioka

doi:10.1117/12.2046149

17 April 2014 Repetitive operation of counter-facing plasma focus device: toward a practical light source for EUV lithography

Tatsuya Sodekoda, Hajime Kuwabara, Masashi Masuda, Shijia Liu, Kouki Kanou, Kenta Kawaguchi, Kazuhiko Horioka

Author Affiliations +

Proceedings Volume 9048, Extreme Ultraviolet (EUV) Lithography V; 904824 (2014) https://doi.org/10.1117/12.2046149
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

In this paper, the latest advances in the field of extreme ultra violet (EUV) light sources for application in counter-facing plasma focus devices are presented. EUV emission, plasma and electrical properties under two pulses operation are reported. Using this new plasma focus system, the total amount of supply material and the energy cost of the plasma source could be reduced. The physical behavior during a two-pulse experiment with a high repetition rate (1 kHz) is explained. Continuous operation for future practical use in advanced lithography systems is also investigated.

Citation Download Citation

Tatsuya Sodekoda, Hajime Kuwabara, Masashi Masuda, Shijia Liu, Kouki Kanou, Kenta Kawaguchi, and Kazuhiko Horioka "Repetitive operation of counter-facing plasma focus device: toward a practical light source for EUV lithography", Proc. SPIE 9048, Extreme Ultraviolet (EUV) Lithography V, 904824 (17 April 2014); https://doi.org/10.1117/12.2046149

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available