High-resolution TFT-LCD for spatial light modulator

JaeWon Lee; Yong-Hae Kim; Chun-Won Byun; Jae-Eun Pi; Himchan Oh; GiHeon Kim; Myung-Lae Lee; Hye-Yong Chu; Chi-Sun Hwang

doi:10.1117/12.2050878

5 June 2014 High-resolution TFT-LCD for spatial light modulator

JaeWon Lee, Yong-Hae Kim, Chun-Won Byun, Jae-Eun Pi, Himchan Oh, GiHeon Kim, Myung-Lae Lee, Hye-Yong Chu, Chi-Sun Hwang

Proceedings Volume 9117, Three-Dimensional Imaging, Visualization, and Display 2014; 911719 (2014) https://doi.org/10.1117/12.2050878
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

SLM with very fine pixel pitch is needed for the holographic display system. Among various kinds of SLMs, commercially available high resolution LCoS has been widely used as a spatial light modulator. But the size of commercially available LCoS SLM is limited because the manufacturing technology of LCoS is based on the semiconductor process developed on small size Si wafer. Recently very high resolution flat panel display panel (~500ppi) was developed as a “retina display”. Until now, the pixel pitch of flat panel display is several times larger than the pixel pitch of LCoS. But considering the possibility of shrink down the pixel pitch with advanced lithographic tools, the application of flat panel display will make it possible to build a SLM with high spatial bandwidth product. We simulated High resolution TFT-LCD panel on glass substrate using oxide semiconductor TFT with pixel pitch of 20um. And we considered phase modulation behavior of LC(ECB) mode. The TFT-LCD panel is reflective type with 4-metal structure with organic planarization layers. The technical challenge for high resolution large area SLM will be discussed with very fine pixel.

Citation Download Citation

JaeWon Lee, Yong-Hae Kim, Chun-Won Byun, Jae-Eun Pi, Himchan Oh, GiHeon Kim, Myung-Lae Lee, Hye-Yong Chu, and Chi-Sun Hwang "High-resolution TFT-LCD for spatial light modulator", Proc. SPIE 9117, Three-Dimensional Imaging, Visualization, and Display 2014, 911719 (5 June 2014); https://doi.org/10.1117/12.2050878

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