Ultra-precision process of CaF2 single crystal

Guoju Yin; Shengyi Li; Xuhui Xie; Lin Zhou

doi:10.1117/12.2069015

6 August 2014 Ultra-precision process of CaF₂ single crystal

Guoju Yin, Shengyi Li, Xuhui Xie, Lin Zhou

Proceedings Volume 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 92811I (2014) https://doi.org/10.1117/12.2069015
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

This paper proposes a new chemical mechanical polishing (CMP) process method for CaF₂ single crystal to get ultraprecision surface. The CMP processes are improving polishing pad and using alkaline SiO₂ polishing slurry with PH=8, PH=11 two phases to polish, respectively, and the roughness can be 0.181nm Rq (10μm×10μm). The CMP process can’t get high surface figure, so we use ion beam figuring (IBF) technology to obtain high surface figure. However, IBF is difficult to improve the CaF₂ surface roughness. We optimize IBF process to improve surface figure and keep good surface roughness too. Different IBF incident ion energy from 400ev to 800ev does not affect on the surface roughness obviously but the depth of material removal is reverse. CaF₂ single crystal can get high precision surface figure (RMS=2.251nm) and still keep ultra-smooth surface (Rq=0.207nm) by IBF when removal depth is less than 200nm. The researches above provide important information for CaF₂ single crystal to realize ultra-precision manufacture.

Citation Download Citation

Guoju Yin, Shengyi Li, Xuhui Xie, and Lin Zhou "Ultra-precision process of CaF₂ single crystal", Proc. SPIE 9281, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 92811I (6 August 2014); https://doi.org/10.1117/12.2069015

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