Research on vacuum utraviolet calibration technology

Jiapeng Wang; Shumin Gao; Hongsheng Sun; Yinghang Chen; Jianqiang Wei

doi:10.1117/12.2075287

18 November 2014 Research on vacuum utraviolet calibration technology

Jiapeng Wang, Shumin Gao, Hongsheng Sun, Yinghang Chen, Jianqiang Wei

Proceedings Volume 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics; 92980Z (2014) https://doi.org/10.1117/12.2075287
Event: International Symposium on Optoelectronic Technology and Application 2014, 2014, Beijing, China

Abstract

Importance of extreme ultraviolet (EUV) and far ultraviolet (FUV) calibration is growing fast as vacuum ultraviolet payloads are wildly used in national space plan. A calibration device is established especially for the requirement of EUV and FUV metrology and measurement. Spectral radiation and detector relative spectral response at EUV and FUV wavelengths can be calibrated with accuracy of 26% and 20%, respectively. The setup of the device, theoretical model and value retroactive method are introduced and measurement of detector relative spectral response from 30 nm to 200 nm is presented in this paper. The calibration device plays an important role in national space research.

Citation Download Citation

Jiapeng Wang, Shumin Gao, Hongsheng Sun, Yinghang Chen, and Jianqiang Wei "Research on vacuum utraviolet calibration technology", Proc. SPIE 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics, 92980Z (18 November 2014); https://doi.org/10.1117/12.2075287

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