Paper
13 March 2015 Status and future of GaN-based vertical-cavity surface-emitting lasers
Author Affiliations +
Proceedings Volume 9363, Gallium Nitride Materials and Devices X; 93631G (2015) https://doi.org/10.1117/12.2079503
Event: SPIE OPTO, 2015, San Francisco, California, United States
Abstract
Vertical-cavity surface-emitting lasers (VCSELs) offer distinct advantages over conventional edge-emitting lasers, including lower power consumption, single-longitudinal-mode operation, circularly symmetric output beams, waferlevel testing, and the ability to form densely packed, two-dimensional arrays. High-performance GaN-based VCSELs are well suited for applications in high-density optical data storage, high-resolution printing, lighting, displays, projectors, miniature atomic clocks, and chemical/biological sensing. Thus far, the performance of these devices has been limited by challenges associated with the formation of high-reflectance distributed Bragg reflectors (DBRs), optical mode confinement, carrier transport, lateral current spreading, polarization-related electric fields, and cavity-length control. This manuscript discusses the state-of-the-art results for electrically injected GaN-based VCSELs and reviews approaches to overcome the key challenges currently preventing higher performance devices. The manuscript also describes the development of nonpolar GaN-based VCSELs on free-standing GaN. Nonpolar orientations exhibit anisotropic optical gain within the quantum well plane and uniquely enable VCSELs with a well-defined and stable polarization state. In addition, a detailed description of a band-gap-selective photoelectrochemical etching (BGS PECE) process for substrate removal and fine cavity length control on free-standing GaN substrates is provided.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniel F. Feezell "Status and future of GaN-based vertical-cavity surface-emitting lasers", Proc. SPIE 9363, Gallium Nitride Materials and Devices X, 93631G (13 March 2015); https://doi.org/10.1117/12.2079503
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Cited by 8 scholarly publications and 3 patents.
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KEYWORDS
Vertical cavity surface emitting lasers

Gallium nitride

Quantum wells

Etching

Dielectrics

Indium gallium nitride

Sapphire

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