Electron Spin Resonance Spectroscopy Of Defects In Low Temperature Dielectric Films

D. Jousse; J. Kanicki; J. Stathis; Y. Cros

doi:10.1117/12.947435

9 August 1988 Electron Spin Resonance Spectroscopy Of Defects In Low Temperature Dielectric Films

D. Jousse, J. Kanicki, J. Stathis, Y. Cros

Proceedings Volume 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III; (1988) https://doi.org/10.1117/12.947435
Event: Advances in Semiconductors and Superconductors: Physics and Device Applications, 1988, Newport Beach, CA, United States

Abstract

The electron spin resonance technique has been used for the identification of defects in silicon-based dielectric thin films deposited by plasma enhanced chemical vapor deposition. Characteristics of the signal due to Si dangling bonds are obtained for oxides, nitrides, and oxynitrides deposited below 500°C. The g-values and linewidths are primarily determined by the composition although defect configurations do not obey random bonding statistics in nitrides and oxynitrides. The defect densities depend essentially on the composition, the growth rate, and the substrate temperature. The good correlation with electrical measurements on MIS structures shows that, in the case of silicon nitride, ESR is a powerful technique for the optimization of deposition conditions for films to be used as low temperature gate insulators.

Citation Download Citation

D. Jousse, J. Kanicki, J. Stathis, and Y. Cros "Electron Spin Resonance Spectroscopy Of Defects In Low Temperature Dielectric Films", Proc. SPIE 0946, Spectroscopic Characterization Techniques for Semiconductor Technology III, (9 August 1988); https://doi.org/10.1117/12.947435

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available