C-MEMS for bio-sensing applications

Yin Song; Richa Agrawal; Chunlei Wang

doi:10.1117/12.2180127

18 May 2015 C-MEMS for bio-sensing applications

Yin Song, Richa Agrawal, Chunlei Wang

Proceedings Volume 9493, Energy Harvesting and Storage: Materials, Devices, and Applications VI; 94930I (2015) https://doi.org/10.1117/12.2180127
Event: SPIE Sensing Technology + Applications, 2015, Baltimore, MD, United States

Abstract

Developing highly sensitive, selective, and reproducible miniaturized bio-sensing platforms require reliable biointerface which should be compatible with microfabrication techniques. In this study, we have fabricated pyrolyzed carbon arrays with high surface area as a bio-sensing electrode, and developed the surface functionalization methods to increase biomolecules immobilization efficiency and further understand electrochemical phenomena at biointerfaces. The carbon microelectrode arrays with high aspect ratio have been fabricated by carbon microelectromechanical systems (C-MEMS) and nanomaterials such as graphene have been integrated to further increase surface area. To achieve the efficient covalent immobilization of biomolecules, various oxidation and reduction functionalization methods have been investigated. The oxidation treatment in this study includes vacuum ultraviolet, electrochemical activation, UV/Ozone and oxygen RIE. The reduction treatment includes direct amination and diazonium grafting. The developed bio-sensing platform was then applied for several applications, such as: DNA sensor; H₂O₂ sensor; aptamer sensor and HIV sensor.

Citation Download Citation

Yin Song, Richa Agrawal, and Chunlei Wang "C-MEMS for bio-sensing applications", Proc. SPIE 9493, Energy Harvesting and Storage: Materials, Devices, and Applications VI, 94930I (18 May 2015); https://doi.org/10.1117/12.2180127

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