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17 July 2015 Optical super-resolution methodology for 3D full field surface profilometry to reconstruction of micro gratings (Withdrawal Notice)
Liang-Chia Chen, Hai Hong Hoang, Shyh-Tsong Lin, Kuang-Chao Fan, Rodion V. Kulikov
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Proceedings Volume 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015); 952421 (2015) https://doi.org/10.1117/12.2189618
Event: International Conference on Optical and Photonic Engineering (icOPEN2015), 2015, Singapore, Singapore
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Publisher’s Note: This paper, originally published on 17 July 2015, was withdrawn per author request, if you have any questions please contact SPIE Digital Library Customer Service for assistance.
© (2015) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Liang-Chia Chen, Hai Hong Hoang, Shyh-Tsong Lin, Kuang-Chao Fan, and Rodion V. Kulikov "Optical super-resolution methodology for 3D full field surface profilometry to reconstruction of micro gratings (Withdrawal Notice)", Proc. SPIE 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015), 952421 (17 July 2015); https://doi.org/10.1117/12.2189618
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KEYWORDS
Super resolution
Current controlled current source
Optical engineering
Photonic integrated circuits
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