Microscopic ellipsometry image of microspheres on a substrate

F.-C. Hsiao; Yu-Da Chen; Trong H. B. Ngo; Huai-Yi Xie; Yia-Chung Chang

doi:10.1117/12.2188150

26 August 2015 Microscopic ellipsometry image of microspheres on a substrate

F.-C. Hsiao, Yu-Da Chen, Trong H. B. Ngo, Huai-Yi Xie, Yia-Chung Chang

Proceedings Volume 9554, Nanoimaging and Nanospectroscopy III; 95540J (2015) https://doi.org/10.1117/12.2188150
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

We performed experimental measurements and theoretical simulation based on an efficient half-space Green’s function method to investigate the diffraction patterns of light scattering from silicon and ZnO microspheres on a substrate. The microscopic ellipsometry image for s- and p-polarized reflectance and their phase difference (R_s, R_p, and Δ) was taken by a modified Optrel MULTISKOP system with rotating compensator configuration for various angles of incidence and wavelengths ranging from 450nm to 750nm. An 80X objective was used and the pixel size for our image is around 200nm. The images obtained display clear diffraction patterns, which is analyzed by an efficient full-wave simulation based on half-space Green’s function method. The near-field distributions obtained theoretically are then converted to far-field images by filtering out the evanescent waves and propagating waves which cannot reach the objective. The experimental results are then compared with simulated images to gain better understanding of the image patterns. Some prominent peaks are observed and attributed to resonances related to whispering gallery modes.

Citation Download Citation

F.-C. Hsiao, Yu-Da Chen, Trong H. B. Ngo, Huai-Yi Xie, and Yia-Chung Chang "Microscopic ellipsometry image of microspheres on a substrate", Proc. SPIE 9554, Nanoimaging and Nanospectroscopy III, 95540J (26 August 2015); https://doi.org/10.1117/12.2188150

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KEYWORDS

Ellipsometry

Silicon

Optical spheres

Reflectivity

Light scattering

Zinc oxide

Specular reflections

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