Growth of Bi2O3 nanocones over large areas by magnetron sputtering

Li-Chia Tien; Ying-Hong Liou

doi:10.1117/12.2186534

20 August 2015 Growth of Bi₂O₃ nanocones over large areas by magnetron sputtering

Li-Chia Tien, Ying-Hong Liou

Proceedings Volume 9558, Nanostructured Thin Films VIII; 95580X (2015) https://doi.org/10.1117/12.2186534
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

Bismuth oxide (Bi₂O₃) is a multi-functional oxide semiconductor with various properties of interest such as high reflective index, high photoconductive response, luminescence and high oxygen-ion conductivity, potentially useful as optical coatings, electrodes of solid oxide fuel cells (SOFC), supercapacitors, visible-light activated photocatalysts, and gas sensors. Large areas of bismuth oxide (Bi₂O₃) nanocones were grown onto Si(001) substrates by magnetron sputtering. The samples were characterized by field emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), transmission electron microscopy (TEM), and photoluminescence (PL). The obtained tapered nanostructures consist of high-density nanocones with diameters approximately 70–130 nm and lengths of 1–3 μm. XRD results reveal that the Bi₂O₃ nanocones can undergo a phase transition from the α to the β phase at growth temperatures over 450°C. This phase transition was confirmed by TEM and PL. The growth mechanism of Bi₂O₃ nanocones was identified as grain boundary-assisted growth, in which a Bi seeding layer is crucial to the formation of the nanostructures. The results herein suggest that introducing a surface seeding layer may provide an effective way to grow various 1D nanostructures over large areas in high yield by magnetron sputtering.

Citation Download Citation

Li-Chia Tien and Ying-Hong Liou "Growth of Bi₂O₃ nanocones over large areas by magnetron sputtering", Proc. SPIE 9558, Nanostructured Thin Films VIII, 95580X (20 August 2015); https://doi.org/10.1117/12.2186534

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available