Analysis on morphological and structural features of graphene layers by using polarization indirect microscopic imaging system

Guoyan Liu; Kun Gao; Guoqiang Ni; Xuefeng Liu

doi:10.1117/12.2195263

12 August 2015 Analysis on morphological and structural features of graphene layers by using polarization indirect microscopic imaging system

Guoyan Liu, Kun Gao, Guoqiang Ni, Xuefeng Liu

Author Affiliations +

Proceedings Volume 9624, 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 96240I (2015) https://doi.org/10.1117/12.2195263
Event: International Conference on Optical Instruments and Technology 2015, 2015, Beijing, China

Abstract

Simple polarization indirect microscopic imaging can visualize graphene layer's dimensions features, however, its limited resolution makes it impossible to analyze the other physical characteristics. Our research uses polarization parameter indirect microscopic imaging system with super-resolution to modulate the variation of far field point spread function with varying polarization status and improve wavefront aberration, sensor error, and polarization angle. This method has much higher sensitivity to graphene overlapping layers, edges, wrinkles and grain boundaries. Finally, this technique for graphene inspection that is capable of reaching super-resolution.

Citation Download Citation

Guoyan Liu, Kun Gao, Guoqiang Ni, and Xuefeng Liu "Analysis on morphological and structural features of graphene layers by using polarization indirect microscopic imaging system", Proc. SPIE 9624, 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 96240I (12 August 2015); https://doi.org/10.1117/12.2195263

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