Development and experiments of lateral shearing interferometer for parabolic surface measurement

Bingcai Liu; Hongjun Wang; Ailing Tian

doi:10.1117/12.2242368

27 September 2016 Development and experiments of lateral shearing interferometer for parabolic surface measurement

Bingcai Liu, Hongjun Wang, Ailing Tian

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96842Z (2016) https://doi.org/10.1117/12.2242368
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Large aperture parabolic mirrors are widely used in high technology areas, such as astronomical optics, space optics et.al. In order to obtain better optical performance, the lateral shearing interferometer was developed for characterizing the surface figure of parabolic mirror. Firstly, based on penta-prism and shearing optical flat, lateral shearing interferometry device was installed; secondly, the shearing phase was calculated by four-step phase shifting algorithm, the transform from shearing phase to primary phase was reconstructed through the selection of discrete sampling points and wave-front fitting, and the shearing interferometry software was programed. Lastly, through a concave parabolic mirror inspection, the precision of the shearing interferometer and the anti-vibration characteristic were verified.

Citation Download Citation

Bingcai Liu, Hongjun Wang, and Ailing Tian "Development and experiments of lateral shearing interferometer for parabolic surface measurement", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96842Z (27 September 2016); https://doi.org/10.1117/12.2242368

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