High precision locating control system based on VCM for Talbot lithography

Jingwei Yao; Lixin Zhao; Qian Deng; Song Hu

doi:10.1117/12.2243616

25 October 2016 High precision locating control system based on VCM for Talbot lithography

Jingwei Yao, Lixin Zhao, Qian Deng, Song Hu

Proceedings Volume 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials; 96850L (2016) https://doi.org/10.1117/12.2243616
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

Aiming at the high precision and efficiency requirements of Z-direction locating in Talbot lithography, a control system based on Voice Coil Motor (VCM) was designed. In this paper, we built a math model of VCM and its moving characteristic was analyzed. A double-closed loop control strategy including position loop and current loop were accomplished. The current loop was implemented by driver, in order to achieve the rapid follow of the system current. The position loop was completed by the digital signal processor (DSP) and the position feedback was achieved by high precision linear scales. Feed forward control and position feedback Proportion Integration Differentiation (PID) control were applied in order to compensate for dynamic lag and improve the response speed of the system. And the high precision and efficiency of the system were verified by simulation and experiments. The results demonstrated that the performance of Z-direction gantry was obviously improved, having high precision, quick responses, strong real-time and easily to expend for higher precision.

Citation Download Citation

Jingwei Yao, Lixin Zhao, Qian Deng, and Song Hu "High precision locating control system based on VCM for Talbot lithography", Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 96850L (25 October 2016); https://doi.org/10.1117/12.2243616

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KEYWORDS

Control systems

Digital signal processing

Lithography

Control systems design

Signal processing

Feedback control

Device simulation

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