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27 April 2016 Development and analysis of new type microresonator with electro-optic feedback
Giedrius Janusas, Arvydas Palevicius, Elingas Cekas, Alfredas Brunius, Jokubas Bauce
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Proceedings Volume 9889, Optical Modelling and Design IV; 98891N (2016) https://doi.org/10.1117/12.2228789
Event: SPIE Photonics Europe, 2016, Brussels, Belgium
Abstract
Micro-resonators are fundamental components integrated in a hosts of MEMS applications: safety and stability systems, biometric sensors, switches, mechanical filters, micro-mirror devices, material characterization, gyroscopes, etc. A constituent part of the micro-resonator is a diffractive optical element (DOE). Different methods and materials are used to produce diffraction gratings for DOEs. Two-dimensional or three-dimensional periodic structures of micrometer-scale period are widely used in microsystems or their components. They can be used as elements for micro-scale synthesis, processing, and analysis of chemical and biological samples. On the other hand micro-resonator was designed using composite piezoelectric material. In case when microscopes, vibrometers or other direct measurement methods are destructive and hardly can be employed for in-situ analysis, indirect measurement of electrical signal generated by composite piezoelectric layer allows to measure natural frequency changes. Also piezoelectric layer allows to create a novel micro-resonator with controllable parameters, which could assure much higher functionality of micro-electromechanical systems. The novel micro-resonator for pollution detection is proposed. Mathematical model of the micro-resonator and its dynamical, electrical and optical characteristics are presented.
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Giedrius Janusas, Arvydas Palevicius, Elingas Cekas, Alfredas Brunius, and Jokubas Bauce "Development and analysis of new type microresonator with electro-optic feedback", Proc. SPIE 9889, Optical Modelling and Design IV, 98891N (27 April 2016); https://doi.org/10.1117/12.2228789
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KEYWORDS
Aluminum
Copper
Biological research
Biological research
Chemical elements
Sensors
Electro optics
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