Paper
26 January 2016 Signal interpolation system for linear time grating displacement sensors
Ziran Chen, Xiaokang Liu, Kai Peng
Author Affiliations +
Proceedings Volume 9903, Seventh International Symposium on Precision Mechanical Measurements; 99031D (2016) https://doi.org/10.1117/12.2211909
Event: Seventh International Symposium on Precision Mechanical Measurements, 2015, Xia'men, China
Abstract
As regards the problems of using absolute linear time grating sensors as the position detector for full closed-loop CNC system, it is necessary transform temporal information to spatial information with time-space transformation algorithm for absolute linear time grating sensors. Time grating sensor’ signal interpolation model is established with time series. The purpose is to extract the relation mapping between future measurement value and past measurement value. In this way, original absolute displacement signal sampled in equal time interval can be converted to continuous incremental pulses required by full closed-loop CNC system. Furthermore, the predicted error model is proposed to improve the interpolation accuracy. The experiment results prove that the interpolation accuracy can reach 0.65 μm, the resolution can reach 0.1 μm.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ziran Chen, Xiaokang Liu, and Kai Peng "Signal interpolation system for linear time grating displacement sensors", Proc. SPIE 9903, Seventh International Symposium on Precision Mechanical Measurements, 99031D (26 January 2016); https://doi.org/10.1117/12.2211909
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KEYWORDS
Sensors

Autoregressive models

Error analysis

Magnetism

Interferometers

Magnetic sensors

Statistical analysis

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