Laser nano-fabrication buried deep inside silicon wafers

Onur Tokel

doi:10.1117/12.2607911

1 April 2022 Laser nano-fabrication buried deep inside silicon wafers

Onur Tokel

Proceedings Volume PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII; PC1198805 (2022) https://doi.org/10.1117/12.2607911
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

Here, we demonstrate the first controlled nano-fabrication capability deep inside silicon wafers. We exploit a spatially-structured laser beam and novel fabrication approaches, in order to achieve multi-dimensional nano-confinement inside the bulk. We demonstrate the formation of 100-nm-sized buried structures. We further showcase this new capability with the first fully buried nano-photonic element inside silicon, a Bragg grating. To the best of our knowledge this constitutes the first controlled nano-fabrication capability, as well as the first functional nano-photonic device, created deep inside silicon without any surface alteration.

Conference Presentation

Citation Download Citation

Onur Tokel "Laser nano-fabrication buried deep inside silicon wafers", Proc. SPIE PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, PC1198805 (1 April 2022); https://doi.org/10.1117/12.2607911

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
PRESENTATION

WATCH
PRESENTATION SAVE TO MY LIBRARY

GET CITATION

KEYWORDS

Silicon

Semiconducting wafers

Nanofabrication

Semiconductor lasers

Nanophotonics

Nanotechnology

Silicon photonics

Show All Keywords

RELATED CONTENT

Hybrid III V on silicon lasers for photonic integrated circuits...
Proceedings of SPIE (February 27 2014)

Butt coupled mid IR diode lasers grown on patterned Si...
Proceedings of SPIE (January 01 1900)

Photonic-crystal lasers on silicon for chip-scale optical interconnects
Proceedings of SPIE (March 07 2016)

Heterogeneous integration of III-V based photonics with silicon
Proceedings of SPIE (February 24 2020)

Cavity enhanced 1.5 um LED with silicon as a hole...
Proceedings of SPIE (March 07 2016)

Silicon-photonics-based optical transceivers for high-speed interconnect applications
Proceedings of SPIE (March 07 2016)

III-V silicon heterogeneous integration for integrated transmitters and receivers
Proceedings of SPIE (February 28 2008)

Subscribe to Digital Library

Receive Erratum Email Alert

Show All Keywords

Keywords/Phrases

Search In:

Publication Years