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1 April 2022 Achieving sub-seconds growth of monolayer WSe2 crystals with time-resolved capturing of growth dynamics
Nurul Azam, Masoud Mahjouri-Samani
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Proceedings Volume PC11990, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2022; PC1199002 (2022) https://doi.org/10.1117/12.2608028
Event: SPIE LASE, 2022, San Francisco, California, United States
Abstract
Controlled and time-resolved growth of atomically thin monolayer transition-metal dichalcogenides (TMDCs) has long been demanded in the emerging field of two-dimensional (2D) materials. However, due to the complex precursor vaporization, mixing, and chemistry as well as random nucleation and ultra-long growth times in the common synthesis techniques such as CVD, understandings the growth kinetics and crystal evolution has been elusive. To address these challenges, here we introduce the laser-assisted synthesis technique (LAST), where a continuous wave CO2 laser is used for the time-resolved vaporization of bulk stoichiometric TMDC powders in a tube furnace under the growth substrate. This technique enables us to study growth dynamics down to a few milliseconds (10ms) along with the record highest growth rate (60μm/s) on a non-epitaxial substrate such as Si/SiO2 ever reported for TMDC mono- and few-layer single crystals.
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Nurul Azam and Masoud Mahjouri-Samani "Achieving sub-seconds growth of monolayer WSe2 crystals with time-resolved capturing of growth dynamics", Proc. SPIE PC11990, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2022, PC1199002 (1 April 2022); https://doi.org/10.1117/12.2608028
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KEYWORDS
Crystals
Chemical vapor deposition
Carbon dioxide lasers
Chemistry
Continuous wave operation
Crystallography
Electronics
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