Integrated optical modulator based on a femtosecond-laser-written micro-mechanical resonator

Roberto Memeo; Andrea Crespi; Roberto Osellame

doi:10.1117/12.2607874

1 April 2022 Integrated optical modulator based on a femtosecond-laser-written micro-mechanical resonator

Roberto Memeo, Andrea Crespi, Roberto Osellame

Proceedings Volume PC11991, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXII; PC119910H (2022) https://doi.org/10.1117/12.2607874
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

We present a way to exploit 3D resonant mechanical micro-structures, embedded in glass substrates, to achieve optical signals switching at MHz frequency. These structures are realised by means of femtosecond laser pulses: combining direct waveguide writing and laser-assisted etching in hydrofluoric acid of the 3D microstructure. The mechanical oscillation of the resonator induces periodical refractive index modifications, due to localised stress, across the waveguide region, thus modulating the phase of the propagating optical signal.

Conference Presentation

Citation Download Citation

Roberto Memeo, Andrea Crespi, and Roberto Osellame "Integrated optical modulator based on a femtosecond-laser-written micro-mechanical resonator", Proc. SPIE PC11991, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXII, PC119910H (1 April 2022); https://doi.org/10.1117/12.2607874

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