Influence of wavelength and pulse duration on the selective laser ablation of WOx, VOx and MoOx thin films

Carlos Molpeceres; Miguel Morales; Cristina Munoz-Garcia; David Canteli; Sara Lauzurica; Eloi Ros; Pablo Ortega; Juan Miguel López-González; Cristobal Voz

doi:10.1117/12.2651658

17 March 2023 Influence of wavelength and pulse duration on the selective laser ablation of WOx, VOx and MoOx thin films

Carlos Molpeceres, Miguel Morales, Cristina Munoz-Garcia, David Canteli, Sara Lauzurica, Eloi Ros, Pablo Ortega, Juan Miguel López-González, Cristobal Voz

Author Affiliations +

Proceedings Volume PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; PC124080Q (2023) https://doi.org/10.1117/12.2651658
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

Transition metal oxide (TMOs) layers have interesting properties as selective contacts for novel semiconductor devices. Especially, oxides of molybdenum (MoO3), vanadium (V2O5), and tungsten (WO3) show good behaviour acting as front hole-selective contacts for n-type crystalline silicon heterojunction solar cells. Laser scribing has been widely used for thin-film ablation and seems the appropriate technology for device manufacturing with such non-conventional materials. In this work, we study the laser scribing of non-stoichiometric evaporated WOx, VOx, and MoOx films with three different wavelengths (1064, 532, and 355 nm) with pulse duration in the ns and ps regimes. The selection of the proper laser source allows a wide parametric window, with complete removal of the TMO films and no alteration of the silicon substrate. The results on the isolation of diodes and their electrical characteristics show the quality of the laser scribing processes.

Conference Presentation

Citation Download Citation

Carlos Molpeceres, Miguel Morales, Cristina Munoz-Garcia, David Canteli, Sara Lauzurica, Eloi Ros, Pablo Ortega, Juan Miguel López-González, and Cristobal Voz "Influence of wavelength and pulse duration on the selective laser ablation of WOx, VOx and MoOx thin films", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080Q (17 March 2023); https://doi.org/10.1117/12.2651658

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