CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12421 > Article
Presentation
21 March 2023 Optical and structural nano-characterization of GaN-based power devices
Jürgen Christen, Gordon Schmidt, Frank Bertram, Arne Debald, Michael Heuken, Thorsten Zweipfennig, Holger Kalisch, Andrei Vescan
Author Affiliations +
Proceedings Volume PC12421, Gallium Nitride Materials and Devices XVIII; (2023) https://doi.org/10.1117/12.2649840
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
We will present nano-scale correlation of structural, electronic and optical properties of GaN-based power devices by cathodoluminescence directly performed in a scanning transmission electron microscope. The two-dimensional electron gas (2DEG) of a lateral AlGaN/GaN field-effect transistor has been investigated directly probing the local origin of the 2DEG by its spectral luminescence fingerprint. This characteristic 2DEG luminescence is locally observed nanometers inside the GaN - close to the GaN/AlN/AlGaN interface. Furthermore, a lateral p-n+ superjunction will be presented, where excitonic and donor-acceptor transitions directly visualize the space charge region evidencing the exciton dissociation in the built-in electric field.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Jürgen Christen, Gordon Schmidt, Frank Bertram, Arne Debald, Michael Heuken, Thorsten Zweipfennig, Holger Kalisch, and Andrei Vescan "Optical and structural nano-characterization of GaN-based power devices", Proc. SPIE PC12421, Gallium Nitride Materials and Devices XVIII, (21 March 2023); https://doi.org/10.1117/12.2649840
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Luminescence
Excitons
Gallium nitride
Scanning transmission electron microscopy
Spectroscopes
Scanning electron microscopy
Semiconductors
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top