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9 March 2023 Volume production of optical transformer-based Campanile scanning near-field probes integrated on an AFM cantilever
Adam Legacy, Keiko Munechika, Junze Zhou, Alexander Weber-Bargioni, Scott Dhuey
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Proceedings Volume PC12447, Quantum Sensing, Imaging, and Precision Metrology; PC1244729 (2023) https://doi.org/10.1117/12.2651320
Event: SPIE Quantum West, 2023, San Francisco, California, United States
Abstract
Near-field scanning optical microscopy (NSOM) is a powerful technique to characterize the chemical and physical properties of materials with nanometer-scale resolution. Adaptation of NSOM has remained mainly in research labs partly due to a lack of commercial availability of high-quality probes. We present a wafer-scale realization of Campanile near-field probes. Campanile probes offer a strong local electromagnetic field enhancement, efficient far-field to near-field coupling, nanoscale spatial resolution, background-free operation, and broadband photon-plasmon coupling to enable high spatial and temporal resolution. The near-field optical mapping of dark-excitonic states of WSe2 monolayers is presented as a use-case example.
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Adam Legacy, Keiko Munechika, Junze Zhou, Alexander Weber-Bargioni, and Scott Dhuey "Volume production of optical transformer-based Campanile scanning near-field probes integrated on an AFM cantilever", Proc. SPIE PC12447, Quantum Sensing, Imaging, and Precision Metrology, PC1244729 (9 March 2023); https://doi.org/10.1117/12.2651320
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KEYWORDS
Near field scanning optical microscopy
Near field optics
Atomic force microscopy
Near field
Integrated optics
Wafer-level optics
Spatial resolution
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