Design, synthesis, and demonstration of multifunctional block copolymers for directed self-assembly applications with varying resolution and density multiplication of features

Paul F. Nealey

doi:10.1117/12.2662593

30 April 2023 Design, synthesis, and demonstration of multifunctional block copolymers for directed self-assembly applications with varying resolution and density multiplication of features

Paul F. Nealey

Author Affiliations +

Proceedings Volume PC12497, Novel Patterning Technologies 2023; PC124970C (2023) https://doi.org/10.1117/12.2662593
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Fundamental properties of block copolymers (BCPs) that determine performance in directed self-assembly (DSA) applications include the Flory-Huggins interaction parameter, the degree of polymerization, and the surface energy and etch selectivity of blocks. These properties are co-varying, and the optimized balance in properties will be different at each resolution and for each application such as DSA plus EUV lithography compared to DSA plus 193i lithography. Here we report a high throughput strategy to mix and match components in (A-block-(B-random-C)) architectures to create libraries of BCPs from which materials can be selected for each different resolution and degree of feature density multiplication.

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Paul F. Nealey "Design, synthesis, and demonstration of multifunctional block copolymers for directed self-assembly applications with varying resolution and density multiplication of features", Proc. SPIE PC12497, Novel Patterning Technologies 2023, PC124970C (30 April 2023); https://doi.org/10.1117/12.2662593

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KEYWORDS

Directed self assembly

Chemistry

X-rays

Manufacturing

Nanolithography

Reflectivity

Scattering

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