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13 March 2024 Optical figuring and shape correction using femtosecond lasers
Jie Qiao, Gong Chen
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Proceedings Volume PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; PC1287205 (2024) https://doi.org/10.1117/12.3004940
Event: SPIE LASE, 2024, San Francisco, California, United States
Abstract
We demonstrate nano-structuring and the reduction of mid-spatial-frequency (MSF) errors using femtosecond laser figuring and finishing. We established a method to create periodic nanostructures using femtosecond-laser-based ablation. In addition, a laser-created sinusoidal pattern with five cycles/mm was generated to mimic the mid-spatial frequency error that often occurs s during conventional optics fabrication. A deterministic material removal having nanometer-scale precision was performed to remove the mid-spatial-frequency error from 17 nm to one nanometer in magnitude. The resulting surface remains single-digit-nanometer surface roughness after the MSF error correction.
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Jie Qiao and Gong Chen "Optical figuring and shape correction using femtosecond lasers", Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC1287205 (13 March 2024); https://doi.org/10.1117/12.3004940
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KEYWORDS
Femtosecond phenomena
Error control coding
Optics manufacturing
Laser optics
Imaging systems
Optical surfaces
Surface roughness
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