Fabry-Perot (FP) etalons play a central role in many industrial and research applications including spectroscopy. In the context of filters and frequency comb generators, they are typically illuminated with nominally collimated light with the intent of achieving a well-behaved, high-finesse spectral response. Few studies have analyzed the transmission profile of defect-limited fused silica FP etalons subjected to a range of illumination conditions. This paper presents such a comprehensive analysis, demonstrating quantitative agreement between theory, experiment, numerical analysis, and ray-tracing analysis. In particular, we predict and characterize the asymmetry and widening of the transmission peaks for the cases of small diameter gaussian beams at normal incidence and near-flat-top incoherent beams at non-normal incidence. Among other applications, we expect our work to support the development of high-performance frequency combs based on low-cost incoherent broadband sources for spectroscopy.
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