Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
Abstract
The patterns of integrated circuits are created on wafers by lithography. The steps of this critical manufacturing process are listed in Table 1.1. Each step will be discussed at length in later chapters of this book, but a brief description of each will be given here. Most of this book is devoted to photolithography, where optical methods are used to transfer the circuit patterns from master images— called masks or reticles—to the wafers. Photolithography is the method used for patterning nearly all integrated circuits fabricated today.
Online access to SPIE eBooks is limited to subscribing institutions.