UV-C whispering-gallery modes in AlN microdisks with AlGaN-based multiple quantum wells on Si substrate

Yiyun Zhang; Hongjian Li; Lining Liu; Panpan Li; Liancheng Wang; Xiaoyan Yi; Guohong Wang

doi:10.1117/1.JNP.12.043502

8 May 2018 UV-C whispering-gallery modes in AlN microdisks with AlGaN-based multiple quantum wells on Si substrate

Yiyun Zhang, Hongjian Li, Lining Liu, Panpan Li, Liancheng Wang, Xiaoyan Yi, Guohong Wang

Author Affiliations +

Funded by: National Key R&D Program of China, National Natural Science Foundation of China (NSFC), National Natural Science Foundation of China

Journal of Nanophotonics, Vol. 12, Issue 4, 043502 (May 2018). https://doi.org/10.1117/1.JNP.12.043502

Abstract

We have successfully fabricated 7-μm 155-nm-thick undercut microdisk cavities with AlN / Al_0.60Ga_0.40N (5.5 nm / 2.5 nm) multiple quantum wells epitaxially grown on Si substrate by metal–organic chemical vapor deposition. Upon optical pumping, whispering-gallery modes (WGMs) with wavelengths around ∼250 nm can be observed throughout the photoluminescence spectrum at room temperature, with quality factors around 500 to 1000. These cavity modes have been analyzed by theoretical calculations. Our results suggest great potentials to demonstrate WGM lasing in the UVC range from these AlGaN/AlN-on-Si microdisk cavities monolithically grown on a Si platform.

Citation Download Citation

Yiyun Zhang, Hongjian Li, Lining Liu, Panpan Li, Liancheng Wang, Xiaoyan Yi, and Guohong Wang "UV-C whispering-gallery modes in AlN microdisks with AlGaN-based multiple quantum wells on Si substrate," Journal of Nanophotonics 12(4), 043502 (8 May 2018). https://doi.org/10.1117/1.JNP.12.043502

Received: 15 March 2018; Accepted: 18 April 2018; Published: 8 May 2018

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