20 March 2023 Single microhole per pixel for thin Ge-on-Si complementary metal-oxide semiconductor image sensor with enhanced sensitivity up to 1700 nm
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Abstract

We present a germanium “Ge-on-Si” CMOS image sensor with backside illumination for the near-infrared (NIR) electromagnetic waves (wavelength range 300 to 1700 nm) detection essential for optical sensor technology. The microholes help to enhance the optical efficiency and extend the range to the 1.7-μm wavelength. We demonstrate an optimization for the width and depth of the microholes for maximal absorption in the NIR. We show a reduction in the crosstalk by employing thin SiO2 deep trench isolation in between the pixels. Finally, we show a 26 to 50% reduction in the device capacitance with the introduction of a microhole. Such CMOS-compatible Ge-on-Si sensors will enable high-density, ultrafast, and efficient NIR imaging.

© 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)
Ekaterina Ponizovskaya-Devine, Ahmed S. Mayet, Amita Rawat, Ahasan Ahamed, Shih-Yuan Wang, Aly F. Elrefaie, Toshishige Yamada, and M. Saif Islam "Single microhole per pixel for thin Ge-on-Si complementary metal-oxide semiconductor image sensor with enhanced sensitivity up to 1700 nm," Journal of Nanophotonics 17(1), 016012 (20 March 2023). https://doi.org/10.1117/1.JNP.17.016012
Received: 24 September 2022; Accepted: 23 February 2023; Published: 20 March 2023
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KEYWORDS
Germanium

Crosstalk

Tunable filters

Image sensors

Optical filters

Simulations

Silicon

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