25 June 2024 Design of mask for depositing continuously variable filter
Xiaodan Gao, Chun Wei
Author Affiliations +
Abstract

This work proposes a mask design method to change the film thickness distribution for the rotary plane coating machine, and successfully deposits a continuously variable filter. The results indicate that the test spectrum exhibits linear gradient passband filtering characteristics at different positions along the spatial direction. The continuously variable filter operates between 650 and 1050 nm, with the linear dispersion coefficient of 32.92 nm/mm over 12 mm. The peak transmittance of the filter is more than 80%, the transmittance of cutoff band is less than 0.1%, and the half bandwidth of the passband is almost consistent with 1.5% of the central wavelength. These parameter indicators fully meet the design requirements.

© 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)
Xiaodan Gao and Chun Wei "Design of mask for depositing continuously variable filter," Journal of Nanophotonics 18(2), 026008 (25 June 2024). https://doi.org/10.1117/1.JNP.18.026008
Received: 2 December 2023; Accepted: 3 June 2024; Published: 25 June 2024
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KEYWORDS
Tunable filters

Film thickness

Design

Optical filters

Linear filtering

Coating equipment

Transmittance

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